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Electrochemical-Chemical Deposition and Etching - Modeling of Silicon Carbide Epitaxial Growth in Hot-Wall Chemical Vapor Deposition Processes Lofgren, P.M. / Ji, W. / Hallin, C. / Gu, C.-Y. | 2000

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Ion sputtered silicon carbide Contaminants on the surface prior to sputtering give rise to classic sputter cone formation. Image courtesy of Scott MacLaren, University of Illinois at Urbana-Champaign, USA

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disk whose dimension were Ø 20 × 5 mm. Standard metallographic procedure was employed for surface preparation. Samples were prepared using 400, 1500, and 2000 grit silicon carbide sandpaper. The specimen 2000 was additionally polished by using a 3 μm

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disk with silicon carbide micropowder. The thickness of the layer to be removed was assessed taking into account the diffusion profile blurring. The thickness of the grinded layer ws usually 50 ÷ 400 μm. Reduction of the i-region was performed using a 3


Seal face: Silicon carbide (Q1, Q2) Seat: Silicon carbide (Q1, Q2) Standards und Freigaben EN 12756 Empfohlene Anwendungen Process industry Oil and gas industry Refining technology Chemical industry Power plant technology Pulp and paper industry

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